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EMS150T Plus镀膜仪

    EMS150T Plus的机壳是整体成型的,结构坚固耐用,配有气冷的70L/S的涡轮分子泵,自动进气控制保证了溅射期间最佳的真空水平,真空腔室直径为165mm并带有防爆装置。EMS150T Plus具有“真空闭锁”功能,可在设备不工作时维持腔室的真空度,从而保证高真空的性能。

    EMS150T Plus系列全自动高真空离子溅射/热蒸发一体化镀膜仪给用户以类似傻瓜相机的简单操作、顶级的镀膜质量和对熟手/新手都很理想的用户界面,让用户真正领略至臻完美的镀膜品质!

根据不同的应用方向,EMS150T细分为三个型号:

l  EMS150TS Plus:高分辨率溅射镀膜仪High Resolution Turbomolecular Pumped Sputter Coater,可溅射易氧化和不易氧化金属,可选各种溅射靶材,包括场发射电镜常用的铱和鉻。

l  EMS150TE Plus:高真空镀碳仪,可制作高稳定的碳膜和表面覆形膜,是TEM应用最理想的选择。

l  EMS150TES Plus:集合了离子溅射和热蒸镀两种真空沉积镀膜方式,镀膜头可在几秒内快速更换,只能逻辑系统自动识别所装的镀膜头类型,并显示相应的操作模式。

注:上述各型号都可配备如下可选的附件:金属蒸镀、碳丝蒸镀、膜厚测量等

 

  

   

触摸屏控制:

EMS150T Plus操作十分简单,直观的触摸屏,即使最不熟练的操作者也可以自由操作,同时可方便的键入和存储数据。为了方便使用,设备中已经预存一些了典型的溅射和蒸发镀膜参数资料。

 

镀膜插入头选项:

l  具有一系列可互换、即插即用的镀膜插入头

l  溅射插入头适用于易氧化和不易氧化金属材料,直径57mmX0.3mm厚鉻靶为标准靶材,可用另外的溅射插入头来快速更换镀膜材料(仅为TSTES型号)

l  适用于3.05mm碳棒蒸发插入头

l  适用于6.15mm碳棒蒸发头,建议使用3.05mm直径的碳棒,它们更容易控制、更经济

l  碳丝蒸发插入头

l  金属蒸发和光阑洁净头,包括向上蒸发或向下蒸发(仅为TETES型号)

 

样品台选项:

l  EMS150T Plus具有各种易更换的样品台,drop-in落入式设计具高度可调(除旋转行星台)。

l  标准配置为旋转台, 直径为50mm

l  可预设倾斜角度的旋转台(可?。?/span>

l  可变角度旋转行星台(可?。?/span>

l  可用于4〞晶圆的平面旋转台(可?。?/span>

l  显微镜载玻片样品台(可?。?/span>

 

其它选项:

l  用于高样品的加高腔室

l  膜厚监测器(FTM

l  用于测量低和高真空的全范围真空计

 

特点和优点:

l  金属溅射或碳蒸发或两者兼备:一体化设计,节约空间

l  精细颗粒溅射:高分辨率场发射扫描电镜(FE-SEM)制样的精细镀膜应用 

l  涡轮分子泵高真空系统:允许不氧化贵金属和易氧化其它金属靶材的溅射镀膜,大大拓宽了可溅射靶材范围,既适合普通SEM、高分辨率FE-SEM镀膜制样应用,也为许多薄膜应用等材料科研领域提供理想的镀膜平台 

l  全自动触摸屏控制:快速数据输入,简单操作 

l  可储存多个客户自定义镀膜方案:对多用户实验室十分理想 

l  与镀膜过程和镀膜材料相匹配的预编程自动真空控制 

l  精细的厚度控制:使用膜厚监控选项 

l  “智能”式系统识别:自动感知用户所装的插入式镀膜头的类型 

l  高真空碳蒸镀:对SEMTEM镀碳膜应用非常理想 

l  蒸发电流波形控制 

l  Drop-in落入式快换样品台(标配旋转台) 

l  真空闭锁功能:可让工作腔室处于真空状态,改善后续真空效果,或在真空条件下保存样品

l  镀制厚膜能力:一次真空条件下的溅射时间可长达60分钟(材料科研领域的应用)

l  人体工程学设计的整体成型机壳:易维护和易拆装 

l  带有本地FTP服务器连接的以太网端口:简单的程序更新 

l  设有功率因素补偿,有效利用电能,降低运行成本 

l  符合当前电器法规(CE认证) 

 

EMS150T Plus仪器参数: 

仪器尺寸

585mm*470mm*410mm(总高650mm)

重量

33.4KG

工作腔室

150mm(内径)*127mm(高)硼硅酸盐玻璃腔室,并带整体安全防护罩

触摸屏用户界面

带有触摸按钮的全图像界面,包含多达十个镀膜程序,可提醒何时需要维护

工作腔室

150mm(内径)*127mm(高)硼硅酸盐玻璃腔室,并带整体安全防护罩

样品台

转速为8-20rpm的旋转台

真空系统

涡轮子分子泵:带有内部空气却的涡轮分子泵,抽速为70L/s

旋转机械泵:抽速为50L/m的两级旋转机械泵,带有油污过滤器

真空测量

皮拉尼真空计作为标配

极限真空度

10-5mbar两级

电源需求

90-250V~50/60Hz 1400VA( 包括旋转机械泵电压240V

气体

溅射工作气体氩气,99.999%TSTES版本);氮气,放气破真空气体(可?。?/font>

金属蒸发和光阑清洁头

用于源自钨丝篮或舟的金属热蒸发??膳浔敢桓霰曜碱庵塾糜谇褰?span lang="EN-US">SEMTEM光阑

碳蒸发

稳定的无纹波直流电源控制的脉冲蒸发,确保源自碳棒或碳丝的可重复蒸碳

电流脉冲

1-90安培

溅射

0-150mA??稍ど枘ず瘢ㄐ?span lang="EN-US">FTM选项)或使用内置定时器

溅射工作真空范围

5*10-35*10-1mbar

溅射靶材和碳耗材供应

EMS150TSEMS150TES标配铬靶,但可选用的其它靶材范围很宽,包括那些广泛用于SEM制样的靶材,如:Au金靶,Au/pd金钯,Pt铂靶,和Iridium铱靶。对非SEM应用,可选用的靶材包括:AI铝,Ta钽,ITO氧化铟锡,Fe铁,W钨,Ti钛,等等:碳制品包括高纯度碳棒和碳丝纤维

订购信息:

货号

产品名称

3390

EMS150T E Plus Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods (3.05mm Ø x 300mm) and a carbon rod shaper (manual operation)

3380

EMS150T S Plus- High resolution turbomolecular pumped sputter coater, including a  54mm Ø x 0.3mm chromium target

3400

EMS150T ES Plus- High-resolution turbomolecular pumped sputter coater, including a  57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods.

91003

Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter

可选配件:

货号

产品名称

3200

Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section

3210

Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly.

3230

Carbon rod evaporation head insert (for 3.05mm Ø rods)

3240

Carbon rod evaporation head insert (for 6.15mm Ø rods). Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage).

3250

Carbon fiber evaporation head insert

3260

Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES
versions only). Supplied with a pack of ten tungsten filaments  and a molybdenum boat.

3270

Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens

3280

Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited

3290

Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited

3300

Spare quartz crystals. Pack of three

3320

Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard)

4513

Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted

3600

Metal evaporation basket - pack of 10 (for use with  metal evaporation head)

3610

Two-year spares kit for EMS150T S
Includes: chromium target, glass cylinder,  carbon fibre cord, quartz crystals, O-rings

3620

Two-year spares kit for EMS150T E
Includes:  chromium target, glass cylinder,  carbon fibre cord,  carbon fibre - fine,  carbon rods 3.05mm, quartz crystals, O-rings

3630

Two-year spares kit for EMS150T ES
Includes:  chromium target, glass cylinder,  carbon fibre cord,  carbon fibre - fine,  carbon rods 3.05mm,  quartz crystals, O-rings

样品台选件;

货号

产品名称

3330

Rotation stage, 50mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment

3340

Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm

3350

Variable angle Rotacota rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm

3360

Flat rotation specimen stage for 100mm / 4 wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm

3370

Rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used

溅射靶材和碳耗材选项:

货号

产品名称

3410

57mm Ø x 0.1mm Gold

3411

57mm Ø x 0.1mm Gold/Palladium (80/20)

3412

57mm Ø x 0.1mm Platinum

3413

57mm Ø x 0.1mm Nickel

3414

57mm Ø x 0.1mm Silver

3415

57mm Ø x 0.1mm Palladium

3416

57mm Ø x 0.1mm Copper

3417

57mm Ø x 0.3mm Chromium

3418

57mm Ø x 0.5mm Tungsten

3419

57mm Ø x 1.5mm Chromium

3420

57mm Ø x 0.2mm Tungsten

3421

54mm Ø x 1.5mm Carbon

3422

57mm Ø x 0.1mm Aluminium

3423

57mm Ø x 0.1mm Platinum/Palladium (80/20)

3424

57mm Ø x 1.5mm Titanium

3425

57mm Ø x 0.3mm Platinum/Palladium (80/20)

3426

57mm Ø x 0.3mm Gold

3427

57mm Ø x 0.3mm Gold/Palladium (80/20)

3428

57mm Ø x 0.3mm Platinum

3429

57mm Ø x 0.5mm Titanium

3430

57mm Ø x 0.1mm Iron

3431

57mm Ø x 0.3mm Iridium

3432

57mm Ø x 0.1mm Cobalt

3433

57mm Ø x 0.1mm Tin

3434

57mm Ø x 0.1mm Molybdenum

3435

57mm Ø x 0.3mm Magnesium

3436

57mm Ø x 0.1mm Tantalum

3437

57mm Ø x 3mm Indium Tin Oxide (90/10)

3500

Carbon rods – 6.15mm Ø x 100mm length (unshaped) pack of 10

3510

Carbon rods – 6.15mm Ø x 50mm length (shaped) pack of 10

3520

Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10

3530

Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10

3540

Carbon fibre cord - high purity - 1m

3550

Carbon fibre cord - high purity - 5m

3560

Carbon fibre cord - standard grade - 1m

3570

Carbon fibre cord - standard grade - 10m

3580

Carbon fibre cord - standard grade - 100m

3590

Manual rod shaper for 6.15mm Ø carbon rods

3595

Manual rod shaper for 3.05mm Ø carbon rods

 

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